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| Place of Origin: | China |
| Brand Name: | Surplus |
| Certification: | ISO9001 |
| Model Number: | Deionized (DI) Water Heater System 02 |
DI Fluid Water Heaters for Semiconductor Manufacturing Process
| Model | PWH-24i | PWH-48i | PWH-72i | PWH-96i | PWH-144i |
|---|---|---|---|---|---|
| Heating method | Radiation heating with near infrared rays | ||||
| Heater wattage | 24kW | 48kW | 72kW | 96kW | 144kW |
| Standard flow rate (at 55°C) | 6l/min | 12l/min | 18l/min | 24l/min | 36l/min |
| Minimum heating flow rate | 2l/min | 5l/min | 10l/min | ||
| Temperature setting range | 25 to 85°C | ||||
| Temperature control accuracy | ±1°C ※1 | ||||
| Flow meter indication range | 0 to 10l/min | 0 to 50l/min (Not the guaranteed range of temperature control accuracy) | |||
| Allowable DI-Water pressure | 0.4MPa (Relief pressure: 0.35MPa) | ||||
| Heater | Halogen lamp. Indirect heating without direct contact with water | ||||
| Heating vessels material | High-purity transparent quartz | ||||
| Wetted materials of the piping | Fluorocarbon polymer | ||||
| Safety functions | Flow rate error, overheating, no liquid operation, leakage sensor disconnection and lamp disconnection Power off, alarm, error indication or signal output in case of error detection | ||||
| External communication function | RS-232C/RS-485 (option) ※2 | ||||
| External input/output function | 8-input/14-output signal (Varies depending on specification) | ||||
| Overall dimensions (mm) ※3 | W340×D850×H1384 | W340×D850×H1384 | W340×D850×H1584 | W340×D850×H1986 | W1050×D700×H2004 |
| Weight | Approx. 140kg | Approx. 150kg | Approx. 160kg | Approx. 210kg | Approx. 410kg |
| Power requirement (50/60Hz) | AC200/208V 69/67A | AC200/208V 139/133A | AC200/208V 208/200A | AC200/208V 277/266A | AC200/208V 416/400A |
A hot water supply system for ultra-pure water that is ideally suited for point-of-use for rinsing of silicon wafers and glass substrates of liquid crystal displays.
DI-Water Heater heats purified water used to rinse silicon wafers in the manufacture of semiconductor and glass substrates in the manufacture of LCDs. The halogen lamps are housed in transparent, double-walled high-purity quartz glass tubes to ensure efficient and contaminant free heating of ultra-pure water. The slim, compact design minimizes foot point for installation at the point of use.
