Semiconductor Process Fluid Heating Heater, PTFE Frame Inline Chemical Heaters
Our inline chemical semiconductor heater delivers unmatched performance for semiconductor process fluid heating with faster heat-up times and rapid installation capabilities.
Key Features
- Faster heatup: Single heater chamber sizes up to 18kW
- Rapid installation: Customized plumbing connections
- Long heater life: Patented gas purge system continuously removes chemical permeation for extended element life
- Clean operation: Protects against potential ionic contamination of chemistry
- Rugged construction: Thick-walled chamber for long service life in high-temperature applications
- Exceptionally clean performance: Thick fluoropolymer sheath minimizes permeation with cleanroom assembly
- Outstanding chemical compatibility: All fluoropolymer-wetted parts compatible with virtually any chemistry
- Excellent temperature stability: Low watt density design enables accurate process temperature control
Applications
SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2)
SC2: hydrochloric acid (HCl) and hydrogen peroxide
Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonium fluoride (NH4F)
Nitride etch/strip: phosphoric acid (H3PO4)
Various acids including hydrochloric (HCl), hydrofluoric (HF), acetic (C2H4O2), nitric (HNO3), sulfuric (H2SO4)
Sulfuric acid and hydrogen peroxide
Sulfuric acid and ozone (O3)
Hydrofluoric acid and glycol (C2H6O2)
Potassium hydroxide (KOH)
Sodium hydroxide (NaOH)
Electroless nickel, copper, and gold
Deionized water
Some solvents (consult factory)
Specifications
Service: Inline chemical heater with all fluoropolymer wetted surfaces
Maximum Working Pressure: 100 PSIG (7 Bar) at 25°C; 43 PSIG at 180°C
Heater Sizes: 1,000 watts up to 18,000 watts
Heater Voltages: 200 to 600 volts, single or three phase (12kW and larger requires three phase)
Watt Density: 10 watts per square inch (1.5w/cm²)
Fluid Connections: 1⁄4" (6mm) to 1" (25mm) flared; 1⁄2" (12mm) to 1" (25mm) Super 300 Type Pillar®; other connections available
Certifications: CE, UL, Semi S2 and S3
Element Purge: Small amount of clean dry air (CDA) or N2 gas flows between the metal grounded element and the PTFE sheath
Other Applications
Electrochemical Deposition
Electrochemical Deposition is a cost-effective process using oxidation and reduction to adhere metal to a surface using electricity. The process is also sometimes referred to as Electro-Plating.
Electrochemical Deposition Products
MOTS TRIPLE - VERTICAL
L-shaped, vertical metal over the side heater. 3,000-36,000 watts, 208-600 volts.
9HS SERIES - TUBULAR
Over the side, 9 element, tubular heater. Three phase. 9000-31500 watts, 208-600 volts.
V SERIES - VARIPOWER
Metal or Fluoropolymer (PTFE) sheath heater. Single phase. Heats up to 212°F (100°C). 100-1000 watts, 120-240 volts.
MOTS SINGLE
Chemical and Small Immersion Heater: Metal over the side single heater. Single or three phase. 1000-12000 watts, 120-600 volts.
MOTS SINGLE - DAS, PHOSPHATE
Top Portable Electric Immersion Heaters: Phosphate, metal over the side heater. Single or three phase. 1000-10000 watts, 120-600 volts.
MOTS TRIPLE - L SHAPED, DERATED
Derated, low watt density, L-shaped, bottom style metal over the side heater. 1500-18000 watts, 120-480 volts.
Ultra-High-Purity Heating
Designed with Ultra-High-Purity processes in mind, we deliver clean-room assembled, reliable heating and power solutions to fit specific needs.
Products For Ultra-High-Purity Heating
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| Inline Heater |
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| PFA Inline Heater |
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| Inline Chemical Heater |
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