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in-line heaters are ideal for high-temperature, ultrapure processes. They feature PFA flow paths for optimal compatibility with aggressive chemicals. Their special internal fittings eliminate O-rings seals for enhanced cleanliness. They utilize the low-mass heating element with low watt density to provide fast, powerful temperature response.
PFA in-line heater are desinged for hydrofluoric acid (HF), potassium hydroxide (KOH), and other chemistry compatible with PFA.
These PFA heaters push widely accepted high-purity materials to operating extremes while maximizing performance and reliability.
We has once again taken heating of high-purity liquids to a new level of performance and reliability.
We has once again taken heating of high purity liquids to a new level of performance and reliability. Heating liquids using high purity materials in a harsh environment requires special skills and knowledge that can only be gained from experience. For over 40 years, Our Engineers have been refining and improving the heated quartz bath and understand the critical needs of the Semiconductor and related industries. The sum of that knowledge has been incorporated into the PFA in-line heater to create products that not only perform, but simplify installation and maintenance as well. Exemplified by our long-standing ISO 9001 registration, our dedication to manufacturing process control assures that our customers receive uniformly high-quality products in a timely manner. We offers a wide range of standard and custom models to allow for easy integration into almost any application.
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Heater
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PFA In-line Chemical Heater
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Wattages
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1.5-12 kW
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Process Chemistries
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Dilute Hydrofluoric acids (DHF),
Buffered Hydrofluoric acids (BHF), Buffered Oxide etch (BOE), Alkaline Chemicals (TMAH, KOH, NAOH), Fluorinated Solvents, Hydrofluoric Acid, Glycol, and much more. |
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Max Operating Temperature
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180°C (consult factory
for higher temperatures) |
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Max Pressure
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40 psi at 180°C
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Voltages
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200-400VAC,
single or 3 phase model dependent |
Since 1997, Surplus has been an industry leader in ultrapure heating, paving the way for PVDF, PTFE, and PFA in-line fluid heaters. With new technology and almost half a decade later, we has improved on legacy designs with the HC Series of PFA in-line heater that offer higher temperatures, enhanced cleanliness, extended life spans, improved reliability, and more. we continues to support heaters. Contact us for details.
Industries
Products For Anodizing |
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MOTS SINGLE – BOTTOM, DERATED .
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MOTS TRIPLE – L SHAPED
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6HS SERIES – TUBULAR
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MOTS TRIPLE – DEEP TANK
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MOTS TRIPLE – DEEP TANK Deep tank, metal over the side heater. Three phase. Heats up to 300°F (149°C). Single or three phase. 18000-54000 watts, 208-600 volts. |
G (GRID) SERIES COIL
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| 9HX SERIES Low watt density, 9 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 3000-18000 watts, 208-600 volts. |
6HX SERIES Low watt density, 6 element fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. Three phase. 2000-12000 watts, 208-600 volts. |
3HXOL SERIES Low watt density, 3 element, bottom heater. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions . 3000-18000 watts, 208-480 volts.
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| HXF SERIES Low-watt density, spiral heater. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. 500-6000 watts, 120-600 Volts. |
HX SERIES Low watt density, spiral. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions . Single phase. 500-9000 watts, 120-600 volts. |
3HX SERIES
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Hot DIW Cleans Wafers Effectively
Cleaning processes that use sulfuric acid (i.e., pre-diffusion clean and resist stripping) leave residual chemical particles that can affect yields and throughput. Particulates can be produced in as little as 48 hours via the migration and nucleation of the H2SO4 molecules. Undesirable steps to address this problem include:
• Chemical cleaning, i.e., hydrofluoric (HF) rinses and RCA clean processes generate added hazardous chemical waste
• Multiple cold DIW rinses waste costly DIW
• Mechanically agitating wafers in a cold DI bath adds energy to cold wafer rinses using robotics that requires high maintenance
Reduce Bacterial Contamination and Improve Process Yields
Wet process stations are excellent environments for bacterial growth caused by low or intermittent flow of DIW, airborne bacteria, and cross contamination from filters.
Heating your DIW to 90º C can sanitize internal plumbing without disassembling station components or using potentially hazardous chemicals. This also eliminates downtime and associated labor costs required for chemical sanitizing. Reducing bacteria contamination improves production yields.