Ultra-High Purity High-Temperature Capability PFA Wet Process Tanks In Semiconductor Applications
PFA (Perfluoroalkoxy) tanks are high-performance storage and processing vessels designed for extreme chemical resistance, ultra-high purity, and high-temperature capability.
Ideal for semiconductor, chemical, and pharmaceutical industries, they are used for storing acids and ultra-pure fluids.
They are available as solid molded tanks or as PFA-lined steel vessels.
Key Features & Advantages
Superior Chemical Resistance: PFA lining resists most acids, alkalis, and strong corrosive media.
Ultra-High Purity: Ideal for applications requiring minimal contamination (low leachable content).
High Temperature Tolerance: Suitable for processes up to 200∘C.
Seamless Options: allows for one-piece molded tanks, eliminating potential leak points and contamination in semiconductor applications
Our surplus designed process and rinse tanks are constructed from a single sheet of application-specific plastic material that is CNC machined and then folded into the form of your tank using the "ORIGAMI" method. Welded corners can create particle/contamination traps and may leak due to workmanship, thermal cycling, or prolonged chemical exposure. The "ORIGAMI" method minimizes welding and provides smooth, seamless, rounded interior corners.
The "ORIGAMI" design and fabrication approach combined with over 40 years of wet process experience delivers optimum process and rinse results at the lowest possible cost.
PTFE tanks are available in configurations for all substrate and cassette sizes in standard or custom designs. Consult with our sales staff to receive a cost-effective quotation. Sales drawings of standard tanks are available upon request.
Custom PTFE Tank Features:
- Manufactured by experienced welders to customer specifications
- Maximum delivered size: 2.0 m × 2.5 m × 2.0 m
- No mold required, economical for smaller production lots
- Flexible designs to meet various application needs
Main Applications:
- Washing tank (Silicon wafer, etc.)
- Temperature-controlled washing tank
- Chemical storage
Industries Served:
- Semiconductor Fabrication
- Solar Cell Manufacturing
- Flat-Panel Display, LEDs & Electronics
- Chemicals Manufacturing
- Industrial Manufacturing
Other Applications
RO/DI Water Heating
Deionized water (DI Water) has become crucial for industrial process applications requiring high-purity impurity removal. Cleaning semiconductors or other ultra-clean devices demands the highest purity levels to prevent product failure.
Applications:
- Semiconductor
- Flat Panel Display
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Heating Systems for Purified, DI Water
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PTFE Inline Chemical Heater
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Point Of Use Heating
Point of Use (POU) Heating refers to the energy-efficient method of placing small heaters near processing baths to reduce heat-up wait times.
Applications:
- Semiconductor Wafer Cleaning
- Etching
- Inline Chemical Heating
- Point of Use Heating (POU)
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High-Purity PFA Inline Chemical Heater
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PTFE Inline Heater
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Inline Chemical Heater
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